A*STAR Technology Partner for Atomic Layer Deposition Process & Development
Azimuth, working with it’s A*STAR Technology Partner, IMRE ( Institute of Materials Research and Engineering ) has formulated a special anti-corrosive coating using Atomic Layer Deposition process, qualifying under Salt Spray Test fo minimum 96 hours corrosion resistance under ASTM B117 StandardFollowing Research Papers on Atomic Layer Deposition done using Azimuth f.xALD System are availiable upon request :
- Field Effects in Plasmonic Photocatalyst byPrecise SiO2 Thickness Control using Atomic Layer Deposition
- Interfacial and Electrical Characterization ofAtomic Layer-Deposited HfO2Gate Dielectric on High Mobility Epitaxial GaAs/Ge Channel Substrates
- Sputter Deposited ZrO2 Gate Dielectric on High MobilityEpitaxial-GaAs/Ge Channel Material for Advanced CMOS Applications
- Surface Passivation of GaAs Substrates with SiO2Deposited using Azimuth f.xALD System
- Wafer-level Self-organized Copolymer Templates for Nanolithography with Sub-50nm Feature and Spatial Resolutions
